JPS627269B2 - - Google Patents

Info

Publication number
JPS627269B2
JPS627269B2 JP15606279A JP15606279A JPS627269B2 JP S627269 B2 JPS627269 B2 JP S627269B2 JP 15606279 A JP15606279 A JP 15606279A JP 15606279 A JP15606279 A JP 15606279A JP S627269 B2 JPS627269 B2 JP S627269B2
Authority
JP
Japan
Prior art keywords
etching
exhaust
pump
rotary pump
oil rotary
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP15606279A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5677381A (en
Inventor
Katsuzo Ukai
Tsutomu Tsukada
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Anelva Corp
Original Assignee
Canon Anelva Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Anelva Corp filed Critical Canon Anelva Corp
Priority to JP15606279A priority Critical patent/JPS5677381A/ja
Publication of JPS5677381A publication Critical patent/JPS5677381A/ja
Publication of JPS627269B2 publication Critical patent/JPS627269B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP15606279A 1979-11-30 1979-11-30 Exhaust system of dry etching unit Granted JPS5677381A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP15606279A JPS5677381A (en) 1979-11-30 1979-11-30 Exhaust system of dry etching unit

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP15606279A JPS5677381A (en) 1979-11-30 1979-11-30 Exhaust system of dry etching unit

Publications (2)

Publication Number Publication Date
JPS5677381A JPS5677381A (en) 1981-06-25
JPS627269B2 true JPS627269B2 (en]) 1987-02-16

Family

ID=15619467

Family Applications (1)

Application Number Title Priority Date Filing Date
JP15606279A Granted JPS5677381A (en) 1979-11-30 1979-11-30 Exhaust system of dry etching unit

Country Status (1)

Country Link
JP (1) JPS5677381A (en])

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2574816Y2 (ja) * 1990-07-09 1998-06-18 三菱電機株式会社 排ガス除害装置
CN110499430B (zh) * 2019-08-23 2022-03-22 攀钢集团攀枝花钢铁研究院有限公司 7.5吨i型炉生产海绵钛用真空系统

Also Published As

Publication number Publication date
JPS5677381A (en) 1981-06-25

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